Browsing by author "Vedula, Srinivas"

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GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

Halder, Sandip; Stiers, Karen; Kandaswamy, Prem Kumar; Rosmeulen, Maarten; Carbonell, Laure; Saripalli, Yoga; Osman, Haris; Rosseel, Erik; Mani, Antonio; Hu, Qiona; Vedula, Srinivas; Polli, Marco (2013)
Innovative metrology for wafer edge defectivity in immersion lithography

Pollentier, Ivan; Iwamoto, Fumio; Kocsis, Michael; Somanchi, Anoop; Burkeen, Frank; Vedula, Srinivas (2007)