Browsing by author "Heyns, Marc"

2D MoS2 film thickness impact on the efficiency of surface-doped devices

Lockhart de la Rosa, Cesar Javier; Arutchelvan, Goutham; Leonhardt, Alessandra; Huyghebaert, Cedric; Radu, Iuliana; Heyns, Marc; De Gendt, Stefan (2017)

300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysis

Koladi Mootheri, Vivek; Okuyama, Atsushi; Smets, Quentin; Schram, Tom; Asselberghs, Inge; Heyns, Marc; Radu, Iuliana; Lin, Dennis (2020)

50 nm Gate Length FinFET Biosensor & the Outlook for Single-Molecule Detection

Santermans, Sybren; Barge, David; Hellings, Geert; Bergfeld Mori, Carlos; Migacz, Konrad Joseph; Rip, Jens; Spampinato, Valentina; Vos, Rita; Du Bois, Bert; Ray Chaudhuri, Ashesh; Martino, J. A.; Heyns, Marc; Severi, Simone; Van Roy, Wim; Martens, Koen (2020)

6.1 family: the next generation of III-V semiconductors for advanced CMOS applications: epitaxial growth and passivation challenges

Merckling, Clement; Alian, AliReza; Firrincieli, Andrea; Jiang, Sijia; Cantoro, Mirco; Dekoster, Johan; Caymax, Matty; Heyns, Marc (2012)

A 35nm diameter vertical silicon nanowire short-gate tunnelFET

Vandooren, Anne; Rooyackers, Rita; Leonelli, Daniele; Iacopi, Francesca; De Gendt, Stefan; Verhulst, Anne; Heyns, Marc; Kunnen, Eddy; Nguyen, Duy; Demand, Marc; Ong, Patrick; Lee, Willie; Moonens, Jos; Richard, Olivier; Vandenberghe, William; Groeseneken, Guido (2009)

A controlled deposition of organic contamination and the removal with ozone based cleaning

Claes, Martine; De Gendt, Stefan; Kenens, Conny; Conard, Thierry; Bender, Hugo; Storm, Wolfgang; Bauer, T.; Lagrange, Sébastien; Mertens, Paul; Heyns, Marc (2001)

A critical perspective on TunnelFETs

Heyns, Marc; Verhulst, Anne (2014)

A deep-level transient spectroscopy study of silicon Schottky barriers containing a Si-O superlattice

Simoen, Eddy; Jayachandran, Suseendran; Delabie, Annelies; Caymax, Matty; Heyns, Marc (2017)

A detailed study on the growth of thin oxide layers on silicon using ozonated solutions

De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Heyns, Marc (2000)

A first-principles study of the structural and electronic properties of III-V/thermal oxide interfaces

Scarrozza, Marco; Pourtois, Geoffrey; Houssa, Michel; Caymax, Matty; Stesmans, Andre; Meuris, Marc; Heyns, Marc (2009)

A force study in brush scrubbing

Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, Jan (2005)

A force study in brush scrubbing

Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Mertens, Paul; Heyns, Marc (2004)

A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

Vermeulen, W.J.C.; kwakman, L.F.T.; Werkhoven, C.J.; Granneman, E.H.A.; Verhaverbeke, Steven; Heyns, Marc (1994)

A high-performance drying method enabling clustered single wafer wet cleaning

Mertens, Paul; Doumen, Geert; Lauerhaas, Jeff; Kenis, Karine; Fyen, Wim; Meuris, Marc; Arnauts, Sophia; Devriendt, Katia; Vos, Rita; Heyns, Marc (2000)

A large scale systematic study of graphene/metal contact resistance using cTLM

Politou, Maria; Liu, Enlong; Asselberghs, Inge; Lee, ChangSeung; Martens, Koen; Radu, Iuliana; Tokei, Zsolt; Huyghebaert, Cedric; De Gendt, Stefan; Heyns, Marc (2014)

A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

Van Hoornick, Nausikaa; Van den Broeck, Kristel; Van Hoeymissen, Jan; Heyns, Marc; Riedel, Wolfgang; Braun, Christian (2004)

A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

Van Hoornick, Nausikaa; Van den Broeck, Kristel; Van Hoeymissen, Jan; Heyns, Marc; Riedel, W.; Braun, C. (2004)