Browsing by author "Bloomstein, Theodore"
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Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations
Bennett, Marylyn Hoy; Grenville, Andrew; Hector, Scott; Palmer, Shane; Leunissen, Peter; Philipsen, Vicky; Bloomstein, Theodore; Hardy, Denis E.; Rothschild, Mordechai; Hilfiker, James N. (2005)