Browsing by author "Sonnemans, R."

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Optimization of resist ash processes on Si045Ge055 substrates for post extension-halo ion implantation

Mannaert, Geert; Vos, Rita; Tsvetanova, Diana; Altamirano Sanchez, Efrain; Witters, Liesbeth; Demand, Marc; Sonnemans, R.; Berry, I. (2011)