Browsing by author "Solano Minuesa, Eduardo"

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Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium

Vandenbroucke, Sofie; Levrau, Elisabeth; Minjauw, Matthias; Solano Minuesa, Eduardo; Van de Kerckhove, Kevin; Devloo-Casier, Kilian; Pulinthanathu Sree, Sreeprasant; Martens, Johan A.; Vos, Rita; Jans, Karolien; Dendooven, Jolien; Vereecken, Philippe; Stakenborg, Tim; Detavernier, Christophe (2019)