Browsing by author "Neimark, Alex. V."
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Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
Eslava Fernandez, Salvador; Baklanov, Mikhaïl; Neimark, Alex. V.; Iacopi, Francesca; Kirschhock, Christine E. A.; Maex, Karen; Martens, Johan A. (2008)