Browsing by author "Pepper, V."

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Impact of using filtration on global and local uniformity of spin on glue materials

Bernard, Sophie; Miller, Andy; Duval, Fabrice; Pepper, V.; Braggin, J. (2011)
Metrology and inspection for process control during bonding and thinning of stacked wafers for manufacturing 3D SIC's

Halder, Sandip; Jourdain, Anne; Claes, Martine; De Wolf, Ingrid; Travaly, Youssef; Beyne, Eric; Swinnen, Bart; Pepper, V.; Guittet, P.Y.; Savage, G.; Markwort, Lars (2011)