Browsing by author "Noakes, Tim"

Now showing items 1-1 of 1

Medium energy ion scattering for the high depth resolution characterization of high-k dielectric layers of nanometer thickness

Van den Berg, Jaap; Reading, Michael; Bailey, Paul; Noakes, Tim; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Conard, Thierry; De Gendt, Stefan; Van Elshocht, Sven (2013)