Browsing by author "Theis, Wolfgang"

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Multi trigger resist for EUV lithography

Popescu, Carmen; Vesters, Yannick; McClelland, Alexandra; De Simone, Danilo; Dawson, Guy; Roth, John; Theis, Wolfgang; Vandenberghe, Geert; Robinson, Alex (2018)
Multi-trigger resist patterning with ASML NXE3300 EUV scanner

Vesters, Yannick; McClelland, Alexandra; De Simone, Danilo; Popescu, Carmen; Dawson, Guy; Roth, John; Theis, Wolfgang; Vandenberghe, Geert; Robinson, Alex P. G. (2018)