Browsing by author "Takahashi,"
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Dummy oxide removal in high-K last process integration how to avoid silicon corrosion issue
Sebaai, Farid; Veloso, Anabela; Takahashi,; Pacco, Antoine; Claes, Martine; Schaekers, Marc; De Gendt, Stefan; Mertens, Paul; Struyf, Herbert (2013)