Browsing by author "French, Roger H."
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High refractive index fluid evaluations: fluid radiation durabilitylifetimes and fluid/resist interactions
French, Roger H.; Bernfeld, Adam S.; Tran, Hoang V.; Adelman, Douglas J.; Liberman, Vladimir; Rothschild, Mordechai; Hendrickx, Eric; Van Roey, Frieda (2008) -
High-index immersion fluids enabling cost-effective single-exposure lithography for 32nm half pitches
French, Roger H.; Tran, Hoang V.; Adelman, Doug J.; Rogado, Nyrissa S.; Kaku, Mureo; Mocella, Michael; Chen, Charles Y.; Hendrickx, Eric; Van Roey, Frieda; Bernfeld, Adam S.; Derryberry, Rebekah A. (2008)