Browsing by author "Geenen, Luc"
Now showing items 21-35 of 35
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Ion implantation in Ge and associated defect control
Satta, Alessandra; Simoen, Eddy; Janssens, Tom; Benedetti, Alessandro; Clarysse, Trudo; De Jaeger, Brice; Geenen, Luc; Brijs, Bert; Meuris, Marc; Vandervorst, Wilfried (2005-09) -
Limits and applications of SIMS in nanoscale technologies
Vandervorst, Wilfried; Janssens, Tom; Geenen, Luc; Conard, Thierry; Huyghebaert, Cedric; Chen, Ping (2005) -
Low temperature epitaxy and the importance of moisture control
Leys, Frederik; Hikavyy, Andriy; Machkaoutsan, Vladimir; De Vos, Brecht; Geenen, Luc; Van Daele, Benny; Loo, Roger; Caymax, Matty (2007) -
Low temperature epitaxy and the importance of moisture control
Leys, Frederik; Hikavyy, Andriy; Machkaoutsan, Vladimir; De Vos, Brecht; Geenen, Luc; Van Daele, Benny; Loo, Roger; Caymax, Matty (2008) -
Modulation of the Ni FUSI workfunction by Yb doping: from midgap to n-type band-edge
Yu, HongYu; Chen, J.D.; Li, M.F.; Lee, S.J.; Kwong, D.L.; van Dal, Marc; Kittl, Jorge; Lauwers, Anne; Augendre, Emmanuel; Kubicek, Stefan; Zhao, Chao; Bender, Hugo; Brijs, Bert; Geenen, Luc; Benedetti, Alessandro; Absil, Philippe; Jurczak, Gosia; Biesemans, Serge (2005) -
N-2 as carrier gas: an alternative to H-2 for enhanced epitaxy of Si, SiGe and SiGe:C
Meunier-Beillard, Philippe; Caymax, Matty; Van Nieuwenhuysen, Kris; Doumen, Geert; Brijs, Bert; Hopstaken, M.; Geenen, Luc; Vandervorst, Wilfried (2004) -
N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C
Meunier-Beillard, Philippe; Caymax, Matty; Van Nieuwenhuysen, Kris; Doumen, Geert; Brijs, Bert; Hopstaken, M.; Geenen, Luc; Vandervorst, Wilfried (2003) -
Near-surface B/As profiling with SIMS: (in)solvable problems?
Vandervorst, Wilfried; Geenen, Luc; Huyghebaert, Cedric; Fruehauf, Jens; Bergmaier, A.; Dollinger, G.; Vandenberg, J.A. (2003) -
New low-stress PECVD Poly-SiGe layers for MEMS
Rusu, Cristina; Sedky, S.; Parmentier, Brigitte; Verbist, Agnes; Richard, Olivier; Brijs, Bert; Geenen, Luc; Witvrouw, Ann; Lärmer, F.; Fischer, F.; Kronmüller, S.; Leca, V.; Otter, B. (2003) -
On the use of indium and gallium as p-type dopants in Si 0.1 μm MOSFETs
Biesemans, Serge; Kubicek, Stefan; Van Laer, Joris; Loosen, Fred; Geenen, Luc; Maex, Karen; De Meyer, Kristin (1995) -
Operation of a Cameca IMS-4f at reduced extraction energies
Vandervorst, Wilfried; Geenen, Luc; Elst, Kathy; De Bisschop, Peter (1994) -
SIMS-profiling of Boron: fundamentals and practical applications
Janssens, Tom; Huyghebaert, Cedric; Brijs, Bert; Geenen, Luc; Conard, Thierry; Vandervorst, Wilfried (2002) -
Study of Ni-Silicide contacts to Si:C source/drain
Cho, Moon Ju; Nouri, F.; Schreutelkamp, Rob; Kim, Y.; Mertens, Sofie; Verheyen, Peter; Steenbergen, Johnny; Vrancken, Christa; Richard, Olivier; Tokei, Zsolt; Lauwers, Anne; Bender, Hugo; Van Daele, Benny; Vandervorst, Wilfried; Geenen, Luc; Absil, Philippe; Kubicek, Stefan; Demeurisse, Caroline (2007) -
The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systems
Vandervorst, Wilfried; Janssens, Tom; Geenen, Luc; Huyghebaert, Cedric; Conard, Thierry; Brijs, Bert (2005) -
Threshold voltage design incompatibility between partially-depleted SOI and bulk CMOS transistors
van Meer, Hans; Lyu, Jeong-ho; Kubicek, Stefan; Geenen, Luc; De Meyer, Kristin (1999)