Browsing by author "Vandervorst, Wilfried"
Now showing items 21-40 of 1434
-
A comprehensive model for the electrical nanocontact on germanium for scanning spreading resistance microscopy applications
Schulze, Andreas; Verhulst, Anne; Nazir, Aftab; Hantschel, Thomas; Eyben, Pierre; Vandervorst, Wilfried (2013) -
A correlative ToF-SIMS/SPM methodology for probing 3D devices
Spampinato, Valentina; Dialameh, Masoud; Franquet, Alexis; Fleischmann, Claudia; Conard, Thierry; van der Heide, Paul; Vandervorst, Wilfried (2020) -
A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Morris, Richard; Cuduvally, Ramya; Vandervorst, Wilfried (2018) -
A demonstration of donor passivation through direct formation of V-Asx complexes in GexSn1-x
Khanam, Afrina; Vohra, Anurag; Slotte, Jonatan; Makkonen, Ilja; Loo, Roger; Pourtois, Geoffrey; Vandervorst, Wilfried (2020-05) -
A detailed study of SCM on cross-sectional and beveled junctions
Duhayon, Natasja; Clarysse, Trudo; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L. (2001) -
A fundamental multitechnique of SIMS depth profiling
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Alay, Josep Lluis; De Coster, Walter (1994) -
A holistic approach of SIMS analysis for advanced semiconductor structures
Franquet, Alexis; Spampinato, Valentina; Pirkl, Alexander; Kayser, Sven; Moellers, Rudolf; Conard, Thierry; Vandervorst, Wilfried; van der Heide, Paul (2019) -
A layer-by-layer reconstruction method including field of view effects, missing atoms and laser effects
Ling, Yu Ting; Bogdanowicz, Janusz; Fleischmann, Claudia; Vandervorst, Wilfried (2018) -
A low-power HKMG CMOS platform compatible with DRAM node 2x and beyond
Ritzenthaler, Romain; Schram, Tom; Spessot, Alessio; Caillat, Christian; Aoulaiche, Marc; Cho, Moon Ju; Noh, Kyung Bong; Son, Yunik; Na, Hoon Jo; Kauerauf, Thomas; Douhard, Bastien; Nazir, Aftab; Chew, Soon Aik; Milenin, Alexey; Altamirano Sanchez, Efrain; Schoofs, Geert; Albert, Johan; Sebaai, Farid; Vecchio, Emma; Paraschiv, Vasile; Vandervorst, Wilfried; Lee, Sun Ghil; Collaert, Nadine; Fazan, Pierre; Horiguchi, Naoto; Thean, Aaron (2014) -
A mathematical description of atomic layer deposition (ALD), and its application to the nucleation and growth of HfO2 gate dielectric layers
Alam, M.A.; Green, Martin; Ho, M.Y.; Vandervorst, Wilfried; Brijs, Bert; Conard, Thierry; Räisänen, P.I. (2002) -
A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (2000) -
A modified capacitance/voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Lanckmans, Filip; Geenen, Luc; Vandervorst, Wilfried; Maex, Karen (1999) -
A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic mode
Claessens, Niels; Vandervorst, Wilfried; Meersschaut, Johan (2020) -
A novel approach of using STM and NC-AFM to study narrow trenches in an oxide matrix
Mannarino, Manuel; Chintala, Ravi Chandra; Eyben, Pierre; Vandervorst, Wilfried (2014) -
A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Dialameh, Masoud; Scheerder, Jeroen; Morris, Richard; Meersschaut, Johan; Richard, Olivier; Vandervorst, Wilfried; van der Heide, Paul; Fleischmann, Claudia (2021) -
A semi-quantitative method for studying photoresist stripping
Rotondaro, Antonio; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Vandervorst, Wilfried; Claeys, Cor; Hellemans, L.; Snauwert, L. (1994) -
A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Brijs, Bert; Conard, Thierry; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H. (2002) -
A successful selective epitaxial Si1-xGex deposition process for HBT-BiCMOS and high-mobility heterojunction pMOS applications
Loo, Roger; Caymax, Matty; Peytier, Ivan; Decoutere, Stefaan; Collaert, Nadine; Verheyen, Peter; Vandervorst, Wilfried; De Meyer, Kristin (2004) -
A trajectory based bottom-up volume reconstruction method for atom probe tomography
Ling, Yu Ting; Cools, S.; De Beenhouwer, Jan; Sijbers, Jan; Vandervorst, Wilfried (2019) -
(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004)