Browsing by author "Van den hove, Luc"
Now showing items 21-40 of 107
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DUV resist profile improvement on TiN deposited metal layer
Lin, Chia-Hui; Chen, Chun-Ho; Jenq, Jhy-Sayang; Op de Beeck, Maaike; Van den hove, Luc (1996) -
E-beam direct write using a chemically amplified negative tone resist
Seabra, Antonio C.; Jonckheere, Rik; Van den hove, Luc (1994) -
Electron beam / DUV intra-level mix-and-match lithography for random logic 0.25 μm CMOS
Jonckheere, Rik; Tritchkov, Alexander; Van Driessche, Veerle; Van den hove, Luc (1995) -
Enabling the technology roadmap to drive a sustainable information society
Van den hove, Luc (2014) -
Europe's sustainable innovation engine
Van den hove, Luc (2013) -
Evaluation of advanced I-line resists for practical 0.5*(l/NA) lithography
Tzviatkov, Plamen; Pforr, Rainer; Jaenen, Patrick; Vertommen, Johan; Van den hove, Luc (1994) -
Executive panel: 450mm: crucial for a global sustainable innovation engine
Van den hove, Luc (2013) -
Executive R&D Panel: A Conversation on the Future of Semiconductor Technology
Van den hove, Luc (2013) -
Exploiting the limits of scaling, and beyond
Van den hove, Luc (2013) -
Extending the Limits of Optical Lithography for Arbitrary Mask Layouts Using Attenuated Phase Shifting Masks with Optimized Illumination
Ronse, Kurt; Pforr, Rainer; Baik, Ki-Ho; Jonckheere, Rik; Van den hove, Luc (1994) -
Feasability demonstration of 0.18 µm and 0.13 µm optical projection lithography based on CD control calculations
Kim, Kee - Ho; Ronse, Kurt; Yen, Anthony; Van den hove, Luc (1996) -
Feasibility of 250 nm gate patterning using i-line with OPC
Van Driessche, Veerle; Finders, Jo; Tritchkov, Alexander; Ronse, Kurt; Van den hove, Luc; Tzviatkov, Plamen (1998) -
Feature biasing versus feature-assisted lithography. A comparison of proximity correction methods for 0.5*(l/NA) lithography
Pforr, Rainer; Wong, Alfred; Ronse, Kurt; Van den hove, Luc; Yen, Anthony; Palmer, S.; Fuller, G.; Otto, O. (1995) -
From connecting lives to improving lives
Van den hove, Luc (2014) -
From connecting lives to improving lives; the internet of EVERYthing
Van den hove, Luc (2015) -
From the happy few to the happy many - Towards an intuitive internet of things
Van den hove, Luc (2015) -
Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification
Ronse, Kurt; Op de Beeck, Maaike; Van den hove, Luc; Engelen, J. (1994) -
How semiconductors will continue to fuel innovation and stimulate economic growth
Van den hove, Luc (2014) -
IC innovation - the heartbeat of yesterday, today, tomorrow
Van den hove, Luc (2016)