Browsing imec Publications by author "O'Connor, Robert"
Now showing items 21-29 of 29
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Temperature-accelerated breakdown in ultra-thin SiON dielectrics
O'Connor, Robert; Hughes, Greg; Degraeve, Robin; Kaczer, Ben (2004) -
The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
Brady-Boyle, Anita; O'Connor, Robert; Armini, Silvia; Selvaraju, V; Bogan, Justin (2019) -
The role of nitrogen in HfSiON defect passivation
O'Connor, Robert; Aoulaiche, Marc; Pantisano, Luigi; Shickova, Adelina; Degraeve, Robin; Kaczer, Ben; Groeseneken, Guido (2009-04) -
Time dependent dielectric breakdown and stress induced leakage current characteristics of 0.7nm EOT HfO2 pFETs
O'Connor, Robert; Hughes, Greg; Kauerauf, Thomas (2011) -
Time dependent dielectric breakdown and stress induced leakage current characteristics of 8 Å EOT HfO2 n-MOSFETs
O'Connor, Robert; Kauerauf, Thomas; Ragnarsson, Lars-Ake; Hughes, Greg (2010) -
Trapping in 1nm EOT high-k / MG
Zahid, Mohammed; Pantisano, Luigi; Degraeve, Robin; Aoulaiche, Marc; Trojman, Lionel; Ferain, Isabelle; san andres, e; Shickova, Adelina; O'Connor, Robert; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan (2008) -
Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer
Petry, Jasmine; Singanamalla, Raghunath; Xiong, K.; Ravit, C.; Simoen, Eddy; O'Connor, Robert; Veloso, Anabela; Adelmann, Christoph; Van Elshocht, Sven; Paraschiv, Vasile; Brus, Stephan; Van Berkum, J.; Kubicek, Stefan; De Meyer, Kristin; Biesemans, Serge; Hooker, Jacob (2007) -
Ubiquitous relaxation in BTI stressing - new evaluation and insights
Kaczer, Ben; Grasser, Tibor; Roussel, Philippe; Martin-Martinez, Javier; O'Connor, Robert; O'Sullivan, Barry; Groeseneken, Guido (2008-04) -
Ultra-thin oxynitride gate dielectrics by pulsed-RF DPN for 65 nm general purpose CMOS applications
Veloso, Anabela; Cubaynes, Florence; Rothschild, Aude; Mertens, Sofie; Degraeve, Robin; O'Connor, Robert; Olsen, Chris; Date, Lucien; Schaekers, Marc; Dachs, Charles; Jurczak, Gosia (2003)