Browsing imec Publications by author "M. Anjos, Daniela"
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Dielectric liner reliability in via-middle through silicon vias with 3 micron diameter
Li, Yunlong; Van Huylenbroeck, Stefaan; Roussel, Philippe; Brouri, Mohand; Gopinath, Sanjaj; M. Anjos, Daniela; Thorum, Matthew; Yu, Jengyi; Beyer, Gerald; Beyne, Eric; Croes, Kristof (2016)