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Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles
dc.contributor.author | Severi, Joren | |
dc.contributor.author | Welling, Ulrich | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-11-02T16:00:26Z | |
dc.date.available | 2021-11-02T16:00:26Z | |
dc.date.issued | 2021-APR | |
dc.identifier.issn | 1932-5150 | |
dc.identifier.other | WOS:000670414000014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37828 | |
dc.source | WOS | |
dc.title | Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles | |
dc.type | Journal article | |
dc.contributor.imecauthor | Severi, Joren | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.identifier.doi | 10.1117/1.JMM.20.2.024601 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 | |
dc.source.issue | 2 | |
dc.source.volume | 20 | |
imec.availability | Under review |
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