Browsing Presentations by author "Maes, Jan"
Now showing items 1-5 of 5
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ALCVD hafnium silicates for low power gate stacks
Maes, Jan; Laitinen, O.; De Witte, Hilde; Deweerd, Wim; Delabie, Annelies; Conard, Thierry; Brijs, Bert; Wang, C. - G.; Velasco, H.; Wilk, G. (2004) -
Band edge work function metal gates using PEALD TaCN electrodes
Maes, Jan; Swerts, Johan; Pierreux, Dieter; Machkaoutsan, Vladimir; Marcus, Steven; Milligan, Brennan; Schram, Tom; Ragnarsson, Lars-Ake; Cacciato, Antonio; Rohr, Erika; Rothschild, Aude; Hendrickx, Paul; Breuil, Laurent; Van den Bosch, Geert (2009) -
Engineering ALCVD HfSiO gate stacks for LSTP applications
Swerts, Johan; Deweerd, Wim; De Witte, Hilde; Maes, Jan; Wilk, Glenn; Delabie, Annelies (2005) -
Growth and characterization of single and mixed metal oxides by ALCVD on various surfaces for high-k gate stack applications
Caymax, Matty; Brijs, Bert; Carter, Richard; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Delabie, Annelies; Heyns, Marc; Richard, Olivier; Vandervorst, Wilfried; Zhao, Chao; Maes, Jan; Chen, Jerry; Cosnier, Vincent; Green, Martin; Kaushik, Vidya; Kluth, Jon; Tsai, Wilman (2002) -
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Baryshnikova, Marina; De Simone, Danilo; Chan, BT; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Kachel, Krzysztof; Knaepen, Werner; Maes, Jan; De Roest, David (2017)