dc.contributor.author | Abell, Thomas | |
dc.contributor.author | Schuhmacher, Jörg | |
dc.contributor.author | Travaly, Youssef | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T12:38:35Z | |
dc.date.available | 2021-10-15T12:38:35Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8455 | |
dc.source | IIOimport | |
dc.title | Nucleation and growth dependence of ALD WNC on substrate surface condition | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Maex, Karen | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 141 | |
dc.source.endpage | 146 | |
dc.source.conference | Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics | |
dc.source.conferencedate | 12/04/2004 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 812 | |