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Nucleation and growth dependence of ALD WNC on substrate surface condition

dc.contributor.authorAbell, Thomas
dc.contributor.authorSchuhmacher, Jörg
dc.contributor.authorTravaly, Youssef
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T12:38:35Z
dc.date.available2021-10-15T12:38:35Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8455
dc.sourceIIOimport
dc.titleNucleation and growth dependence of ALD WNC on substrate surface condition
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage141
dc.source.endpage146
dc.source.conferenceMaterials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics
dc.source.conferencedate12/04/2004
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 812


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