Creep as a reliability problem in MEMS

Modlinski, RobertRobertModlinskiWitvrouw, AnnAnnWitvrouwRatchev, PetarPetarRatchevPuers, BobBobPuersToonder, J.M.JJ.M.JToonderDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9309Creep as a reliability problem in MEMSProceedings paper