Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenides

Delabie, AnneliesAnneliesDelabieGroven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneZhang, HaodongHaodongZhangTomczak, YoannYoannTomczakCaymax, MattyMattyCaymaxRadu, IulianaIulianaRadu2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26531Challenges and opportunities for Atomic Layer Deposition of 2D transition metal dichalcogenidesOral presentation