Molecular layer deposition of "titanicone", a titanium-based hybrid material

Van de Kerckhove, KevinKevinVan de KerckhoveMattelaer, FelixFelixMattelaerDeduytsche, DavyDavyDeduytscheVereecken, PhilippePhilippeVereeckenDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2021-10-232021-10-2320161477-9226https://imec-publications.be/handle/20.500.12860/27432Molecular layer deposition of "titanicone", a titanium-based hybrid materialJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2016/dt/c5dt03840e#!divAbstract