Zhao, ChaoChaoZhaoVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymax2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9980HfO2 by ALD and MOCVD on GeOral presentation