Cleaning and strip requirement for metal gate based CMOS integration

Schram, TomTomSchramSebaai, FaridFaridSebaaiClaes, MartineMartineClaesVos, RitaRitaVosWada, MasayuliMasayuliWadaRohr, ErikaErikaRohrKubicek, StefanStefanKubicek2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16180Cleaning and strip requirement for metal gate based CMOS integrationMeeting abstract