Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors

Tajalli, A.A.TajalliCanato, E.E.CanatoNardo, A.A.NardoMeneghini, M.M.MeneghiniStockman, ArnoArnoStockmanMoens, P.P.MoensZanoni, E.E.ZanoniMeneghesso, G.G.Meneghesso2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34098Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistorsProceedings paperhttps://ieeexplore.ieee.org/document/8720445