Study of sub-melt laser damage annealing using Therma-Probe

Rosseel, ErikErikRosseelBogdanowicz, JanuszJanuszBogdanowiczClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstSalnik, AlexAlexSalnikHan, Sang-HyunSang-HyunHanNicolaides, LenaLenaNicolaides2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16139Study of sub-melt laser damage annealing using Therma-ProbeProceedings paper