Contact layer printing at 0.28k1 by means of double line exposure and negative tone development

Bekaert, JoostJoostBekaertMaenhoudt, MireilleMireilleMaenhoudtVandenberghe, GeertGeertVandenbergheReybrouck, MarioMarioReybrouck2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13363Contact layer printing at 0.28k1 by means of double line exposure and negative tone developmentProceedings paper