Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry

Laricchiuta, GraziaGraziaLaricchiutaVandervorst, WilfriedWilfriedVandervorstVickridge, IanIanVickridgeMayer, MatejMatejMayerFavia, PaolaPaolaFaviaSchulze, AndreasAndreasSchulzeMeersschaut, JohanJohanMeersschaut2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28758Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometryMeeting abstract