Laser annealed in-situ P-doped Ge for on-chip laser source apllications

Srinivasan, AshwynAshwynSrinivasanPantouvaki, MariannaMariannaPantouvakiShimura, YosukeYosukeShimuraPorret, ClémentClémentPorretVan Deun, RikRikVan DeunLoo, RogerRogerLooVan Thourhout, DriesDriesVan ThourhoutVan Campenhout, JorisJorisVan Campenhout2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27344Laser annealed in-situ P-doped Ge for on-chip laser source apllicationsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2541474