Philipsen, HaroldHaroldPhilipsenMouwen, NilsNilsMouwenTeck, SanderSanderTeckMonnens, WouterWouterMonnensLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteynsStruyf, HerbertHerbertStruyf2021-10-272021-10-2720190013-4686https://imec-publications.be/handle/20.500.12860/33792Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutionsJournal articlehttps://doi.org/10.1016/j.electacta.2019.03.065