Comparison of pattern placement errors as measured using traditional overlay targets and design rule structures

Leray, PhilippePhilippeLerayLaidler, DavidDavidLaidlerPollentier, IvanIvanPollentier2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7797Comparison of pattern placement errors as measured using traditional overlay targets and design rule structuresProceedings paper