Nanoscale imaging and x-ray spectroscopy of electrically active defects in ultra thin dielectrics on silicon

Bernardini, S.S.BernardiniIshii, M.M.IshiiWhittaker, E.E.WhittakerHamilton, B.B.HamiltonFreeland, C.C.FreelandPoolton, N.R.J.N.R.J.PooltonDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11720Nanoscale imaging and x-ray spectroscopy of electrically active defects in ultra thin dielectrics on siliconJournal article