Milojevic, DragomirDragomirMilojevicAgrawal, PrashantPrashantAgrawalRaghavan, PraveenPraveenRaghavanVan der Plas, GeertGeertVan der PlasCatthoor, FranckyFranckyCatthoorVan der Perre, LiesbetLiesbetVan der PerreVelenis, DimitriosDimitriosVelenisVaradarajan, RaviRaviVaradarajanBeyne, EricEricBeyne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33590Ultra-fine pitch 3D-stacked integrated circuits: technology, design enablement and applicationBook chapterhttps://doi.org/10.1002/9783527697052.ch2