Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film

Ling, FangzhouFangzhouLingDe Coster, JeroenJeroenDe CosterBeernaert, RoelRoelBeernaertLin, Wan-YuWan-YuLinCelis, Jean-PierreJean-PierreCelisDe Wolf, IngridIngridDe Wolf2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17505Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer filmProceedings paper