Ke, Tung HueiTung HueiKeMalinowski, PawelPawelMalinowskiRolin, CedricCedricRolinCheyns, DavidDavidCheynsGenoe, JanJanGenoeKroneneijer, AukeAukeKroneneijerAkkerman, HylkeHylkeAkkermanMeulenkamp, EricEricMeulenkampHeremans, PaulPaulHeremans2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35367Scaling and monolithic integration of organic and Hybrid electronic by advanced photolithographyProceedings paper