Janssens, TomTomJanssensWostyn, KurtKurtWostynArnauts, SophiaSophiaArnautsDe Geyter, AnneliesAnneliesDe GeyterBearda, TwanTwanBeardaMertens, PaulPaulMertens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12359Local removal frequency of nano particles in megasonic cleaningProceedings paper