Effects of low-thermal-budget treatments on the porous silicon material properties

Stalmans, LievenLievenStalmansPoortmans, JefJefPoortmansBender, HugoHugoBenderJin, S.S.JinConard, ThierryThierryConardDebarge, L.L.DebargeSlaoui, A.A.SlaouiNijs, JohanJohanNijs2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2970Effects of low-thermal-budget treatments on the porous silicon material propertiesProceedings paper