Witvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveriHelin, PhilippePhilippeHelinHaspeslagh, LucLucHaspeslagh2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16556SiGe MEMS TechnologyJournal articlehttp://www.future-fab.com/welcome.asp