Bogdanowicz, JanuszJanuszBogdanowiczFolkersma, StevenStevenFolkersmaSergeant, StefanieStefanieSergeantSchulze, AndreasAndreasSchulzeParedis, KristofKristofParedisCelano, UmbertoUmbertoCelanoKunert, BernardetteBernardetteKunertGuo, WeimingWeimingGuoMols, YvesYvesMolsPetersen, DirchDirchPetersenWitthoft, Maria-LouiseMaria-LouiseWitthoftHansen, OleOleHansenHenrichsen, HenrikHenrikHenrichsenNielsen, PieterPieterNielsenVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27876Sheet-resistance measurements in nanometer-wide conductive linesMeeting abstracthttps://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf