SEM image denoising with Unsupervised Machine Learning for better defect inspection and metrology

Dey, BappadityaBappadityaDeyHalder, SandipSandipHalderKhalil, K.K.KhalilLorusso, GianGianLorussoSeveri, JorenJorenSeveriLeray, PhilippePhilippeLerayBayoumi, M.M.Bayoumi2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36666SEM image denoising with Unsupervised Machine Learning for better defect inspection and metrologyProceedings paperhttps://doi.org/10.1117/12.2584803