Depth resolution and surface transients in crystalline Silicon at ultra low energies

Goossens, JozefienJozefienGoossensBerghmans, BartBartBerghmansFranquet, AlexisAlexisFranquetNguyen, DuyDuyNguyenDelmotte, JorisJorisDelmotteGeenen, LucLucGeenenRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172009-09https://imec-publications.be/handle/20.500.12860/15372Depth resolution and surface transients in crystalline Silicon at ultra low energiesMeeting abstract