Role of the Ta scavenger electrode in the excellent switching control and reliability of a scalable low-current operated TiN\Ta2O5\Ta RRAM device

Goux, LudovicLudovicGouxFantini, AndreaAndreaFantiniRedolfi, AugustoAugustoRedolfiChen, MichaelMichaelChenShi, FangFangFangFangShiDegraeve, RobinRobinDegraeveChen, YangyinYangyinChenWitters, ThomasThomasWittersGroeseneken, GuidoGuidoGroesenekenJurczak, GosiaGosiaJurczak2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23871Role of the Ta scavenger electrode in the excellent switching control and reliability of a scalable low-current operated TiN\Ta2O5\Ta RRAM deviceProceedings paper