Zhao, ChaoChaoZhaoRittersma, Z.M.Z.M.Rittersmavan Berkum, J.G.M.J.G.M.van BerkumSnijders, J.H.M.J.H.M.SnijdersHendriks, A.A.HendriksBreimer, P.P.BreimerGraat, P.P.GraatMaes, JanJanMaesWitters, H.H.WittersAfanasiev, ValeriValeriAfanasievTois, E.E.ToisTuominen, N.N.TuominenCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11608Properties of HfTaxOy high-k layers deposited by ALCVDProceedings paper