Vantomme, AndreAndreVantommeWu, Ming FangMing FangWuHogg, S.S.HoggLangouche, G.G.LangoucheYao, S.S.YaoJacobs, KoenKoenJacobsMoerman, IngridIngridMoermanLi, J.J.LiZhang, G. Y.G. Y.Zhang2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3983Direct determination of the composition and elastic strain in InGaN and AlGaN layersMeeting abstract