Low-temperature pre-epitaxy surface cleaning of Si and SiGe

Profijt, HaraldHaraldProfijtSuhard, SamuelSamuelSuhardRosseel, ErikErikRosseelTolle, JohnJohnTolleMertens, HansHansMertensDhayalan, Sathish KumarSathish KumarDhayalanHikavyy, AndriyAndriyHikavyyWeeks, DoranDoranWeeksHolsteyns, FrankFrankHolsteynsLoo, RogerRogerLooMehta, SandeepSandeepMehtaMaes, JanJanMaes2021-10-222021-10-222015-05https://imec-publications.be/handle/20.500.12860/25776Low-temperature pre-epitaxy surface cleaning of Si and SiGeMeeting abstract