Lenci, SilviaSilviaLenciGonzalez, PilarPilarGonzalezDe Meyer, KristinKristinDe MeyerVan Hoof, RitaRitaVan HoofFrederickx, DannyDannyFrederickxWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14006Determination of the piezoresistivity of microcrystalline silicon-germanium and application to a pressure sensorProceedings paper