Beral, ChristopheChristopheBeralVan Den Heuvel, DieterDieterVan Den HeuvelBeggiato, MatteoMatteoBeggiatoChowrira Poovanna, BhavishyaBhavishyaChowrira PoovannaPaolillo, SaraSaraPaolilloMoussa, AlainAlainMoussaFoubert, PhilippePhilippeFoubertCerbu, DorinDorinCerbuDemaude, AnnaëlleAnnaëlleDemaudeLeray, PhilippePhilippeLerayCharley, Anne-LaureAnne-LaureCharley2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300044https://imec-publications.be/handle/20.500.12860/45954High NA EUV defectivity inspection: overview and challengesProceedings paper10.1117/12.3051293978-1-5106-8639-7WOS:001514426300044