Janssens, Stoffel D.Stoffel D.JanssensPobedinskas, PauliusPauliusPobedinskasPetrakova, VladimiraVladimiraPetrakovaNesladek, MilosMilosNesladekHaenen, KenKenHaenenWagner, PatrickPatrickWagner2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19129Influence of methane concentration on the electric transport properties in heavily boron-doped nanocrystalline CVD diamond filmsProceedings paper