Continuous time-of-flight ranging using a MEMS diffractive subwavelength period grating (de)modulator

Roels, JorisJorisRoelsVan der Tempel, WardWardVan der TempelVan Nieuwenhove, DanielDanielVan NieuwenhoveGrootjans, RiemerRiemerGrootjansKuijk, MaartenMaartenKuijkVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-1720081041-1135https://imec-publications.be/handle/20.500.12860/14382Continuous time-of-flight ranging using a MEMS diffractive subwavelength period grating (de)modulatorJournal article