Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomography

Kambham, Ajay KumarAjay KumarKambhamKumar, ArulArulKumarFlorakis, AntoniosAntoniosFlorakisVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-2120130957-4484https://imec-publications.be/handle/20.500.12860/22566Three-dimensional doping and diffusion in nano scaled devices as studied by atom probe tomographyJournal articlehttp://iopscience.iop.org/0957-4484/24/27/275705/